The 78th JSAP Autumn Meeting, 2017

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Poster presentation

13 Semiconductors » 13.2 Exploratory Materials, Physical Properties, Devices

[7p-PB4-1~12] 13.2 Exploratory Materials, Physical Properties, Devices

Thu. Sep 7, 2017 1:30 PM - 3:30 PM PB4 (P)

1:30 PM - 3:30 PM

[7p-PB4-8] Preparation of BaSi2 thin-films on Si (111) by helicon-wave-plasma sputtering

〇Satoshi Matsuno1, Ryota takabe1, Kaoru Toko1, Takashi suemasu1,2 (1.Univ. tsukuba, 2.JST-CREST)

Keywords:semiconductor, sputtering