4:30 PM - 4:45 PM
△ [7p-S45-11] Control of optical properties for silicon photonic crystal nanocavity using femtosecond laser processing
Keywords:femtosecond laser, photonic crystal, nanocavity
Photonic crystal nanocavities on silicon-on-insulator (SOI) wafers are attracting much attention because of their high quality factors (Q) and small modal volumes. There are many kinds of applications of nanocavities such as optical integrated circuits, biosensors, low-threshold lasers, and quantum information processing devices. Because these applications require wide ranges of Q factors from thousands to several millions, the nanocavities have been expanding the research fields with the increase of the Q values.
We previously fabricated photonic crystal high-Q nanocavities on a 300-mm-wide SOI wafer by using CMOS compatible process and obtained good optical properties. However, we also found the properties of nanocavities fluctuate from their ideal value randomly. Since it is unknown whether the fluctuation can be reduced by improving the CMOS process, it is important to develop a post process method.
In this study, we tried to control optical properties for silicon photonic crystal nanocavity using femtosecond laser processing.
We previously fabricated photonic crystal high-Q nanocavities on a 300-mm-wide SOI wafer by using CMOS compatible process and obtained good optical properties. However, we also found the properties of nanocavities fluctuate from their ideal value randomly. Since it is unknown whether the fluctuation can be reduced by improving the CMOS process, it is important to develop a post process method.
In this study, we tried to control optical properties for silicon photonic crystal nanocavity using femtosecond laser processing.