[7p-S45-1~14] 3.7 Laser processing

△ [7p-S45-7] Laser micro-hole drilling by tightly focused vector beam

〇Shugo Matsusaka¹, Yuichi Kozawa¹, Shunichi Sato¹ (1.IMRAM, Tohoku Univ.)

Keywords:vector beam, laser processing, polarization

We investigate the effects of vector beams in laser micro processing using a high-NA objective lens. In this presentation, we report the experimental results of laser drilling using vector beams for different NA conditions in terms of piercing time. An azimuthally polarized beam focused using a high-NA lens exhibits exceedingly high speed in deep hole drilling.