[8a-A402-1~9] 8.5 Plasma nanotechnology

△ [8a-A402-8] An analysis of kinetic motion of optically trapped single fine particle in Ar plasma

〇Hiroshi Ohtomo¹, Kento Mori¹, Ren Zhou¹, Daisuke Yamashita¹, Hyunwoong Seo¹, Naho Itagaki¹, Kazunori Koga¹, Masaharu Shiratani¹ (1.Kyushu Univ.)

Keywords:plasma process, plasma fluctuations, optical tweezers