10:00 〜 10:15
▲ [8a-A413-5] Perpendicularly magnetized L10-MnAl thin films for STT-MRAM
キーワード：STT- MRAM, MTJ, Gilbert damping constant
L10 ordered MnAl thin films were epitaxially grown by sputtering. In this work, we fabricated MnAl and (Mn1-xCox)0.5Al0.5 films on MgO single crystal substrate having a high perpendicular magnetic anisotropy energy Ku , small saturation magnetization Ms and Gilbert damping constant .Both L10-ordered and highly (001)-oriented MnAl films were successfully fabricated.The substrate and annealing temperature were varied from 2000C to 4000C to improve the magnetic properties and surface morphology.The value of Ku for MnAl film was 1.2×107 erg/cc, small saturation magnetization, Ms of 518 emu/cc and very smooth surface morphology were observed at substrate temperature of 350oC .However the surface roughness were increased with the increasing of substrate temperature.In our previous works, it is expected the crystalline structure was improved by adding Co into MnAl .