The 78th JSAP Autumn Meeting, 2017

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Oral presentation

13 Semiconductors » 13.2 Exploratory Materials, Physical Properties, Devices

[8a-C11-1~12] 13.2 Exploratory Materials, Physical Properties, Devices

Fri. Sep 8, 2017 9:00 AM - 12:15 PM C11 (Office 1)

Haruhiko Udono(Ibaraki Univ.), Kenji Yamaguchi(QST)

9:00 AM - 9:15 AM

[8a-C11-1] Investigation of Si/Fe composition in β-FeSi2 epitaxial films by spectroscopic ellipsometry

〇Naoki Murakoso1, Hirofumi Hoshida1, Motoki Iinuma1, Hajime Eguchi1, Yoshikazu Terai1 (1.Kyushu Inst. of Tech.)

Keywords:FeSi2, Ellipsometry, Investigation of composition