[8a-PA1-1~17] 6.2 Carbon-based thin films

[8a-PA1-16] Deposition of silicon-doped diamond-like carbon film using dual sputtering

〇(M1)Yuki Miwa¹, Takayuki Ohta¹, Akinori Oda², Hiroyuki Kousaka³ (1.Meijo Univ., 2.Chiba Inst. Technol., 3.Gifu Univ.)

Keywords:diamond-like carbon, silicon-doped diamond-like carbon, sputtering

Silicon-containing diamond-like carbon (Si-DLC) has been attracted attention as a low-friction coating material. Silicon-containing diamond-like carbon films were deposited by using dual magnetron sputtering with silicon and carbon targets. By changing the power applied to the Si target, not only the Si content but also the structure of the DLC film changed.