[8a-PA1-1~17] 6.2 Carbon-based thin films

[8a-PA1-17] Photoemission spectroscopy evaluations of p-type amorphous SiC films prepared using liquid silicon materials

〇Tatsuya Murakami¹, Takashi Masuda¹, Tatsuya Shimoda¹ (1.JAIST)

Keywords:liquid materials, amorphous silicon carbide

Phosphorus-doped amorphous silicon carbide films were prepared using a polymeric precursor solution. Unlike conventional polymeric precursors, this polymer requires neither catalysts nor oxidation for its synthesis and cross-linkage, providing semiconducting properties in the films. The valence and conduction states of resultant films were determined directly through the combination of inverse photoemission spectroscopy and photoelectron yield spectroscopy. The incorporated carbon widened energy gap and optical gap comparably in the films with lower carbon concentrations. In contrast, a large deviation between the energy gap and the optical gap was observed at higher carbon contents because of exponential widening of the band tail.