[8a-PA2-1~17] 6.4 Thin films and New materials

[8a-PA2-14] Growth of Mn₃CuN thin films by dynamic aurora PLD

〇Jumpei Suzuki¹ (1.Shizuoka Univ.)

Keywords:PLD, magnetic material

For the thin film preparation of Mn₃CuN which has anti-perovskite structure the previous studies imply that the supply of nitrogen plasma is essentially important. Dynamic Aurora PLD method, which has been developed by us can apply a magnetic field during PLD. Consequently, the recombination of plasma of source elements in the plume can be suppressed. This means that the supply of nitrogen plasma can be expected directly from the nitride target. Therefore, we report on the growth of Mn₃CuN thin films using Dynamic Aurora PLD method.