Integration effect of O<sub>2</sub> plasma to excimar-laser assisted MOD process

Presentation information

Poster presentation

6 Thin Films and Surfaces » 6.4 Thin films and New materials

Fri. Sep 8, 2017 9:30 AM - 11:30 AM PA2 (P)

9:30 AM - 11:30 AM

〇(M2)Ryusei Segawa¹, Masami Nishikawa¹, Tomohiko Nakajima², Tetsuo Tsuchiya², Nobuo Saitou¹, Takayuki Ishibashi¹ (1.Nagaoka Univ., 2.AIST)

Keywords:photoelectrode