The 78th JSAP Autumn Meeting, 2017

Presentation information

Poster presentation

21 Joint Session K » Joint Session K "Wide bandgap oxide semiconductor materials and devices"(Poster)

[8a-PA4-1~31] Joint Session K "Wide bandgap oxide semiconductor materials and devices"(Poster)

Fri. Sep 8, 2017 9:30 AM - 11:30 AM PA4 (P)

9:30 AM - 11:30 AM

[8a-PA4-15] Growth of SnOx thin film by mist chemical vapor deposition and its ionic valence control

Sachi Nakamura1, Kazuyuki Uno1, Ichiro Tanaka1 (1.Wakayama Univ.)

Keywords:oxide semiconductors, mist chemical vapor deposition, thin oxide