Mist CVD Growth of Ga<sub>2-x</sub>Sn<sub>x</sub>O Films

Presentation information

Poster presentation

21 Joint Session K » Joint Session K "Wide bandgap oxide semiconductor materials and devices"（Poster）

Fri. Sep 8, 2017 9:30 AM - 11:30 AM PA4 (P)

9:30 AM - 11:30 AM

〇(M1)Kenichiro Rikitake¹, Takuya Kobayashi¹, Tomohiro Yamaguchi¹, Takeyoshi Onuma¹, Tohru Honda¹ (1.Kogakuin Univ.)

Keywords:Crystal growth, Gallium Oxide, Mist CVD