[8a-PA4-1~31] Joint Session K "Wide bandgap oxide semiconductor materials and devices"（Poster）

[8a-PA4-28] Fabrications of β-Ga₂O₃ thin films by molecular precursor method

〇Takashi Yasuda¹, Akira Shibata¹ (1.I-Senshu Univ.)

Keywords:Gallium Oxide, molecular precursor, coating technique

We present fabrications and characterizations of β-Ga₂O₃ thin films by molecular precursor method, which is a simple coating technique.