The 78th JSAP Autumn Meeting, 2017

Presentation information

Poster presentation

8 Plasma Electronics » 8.3 Plasma deposition of thin film and surface treatment

[8a-PB4-1~20] 8.3 Plasma deposition of thin film and surface treatment

Fri. Sep 8, 2017 9:30 AM - 11:30 AM PB4 (P)

9:30 AM - 11:30 AM

[8a-PB4-15] Hydrodesulfurization Effect of Sulfur Oxide Using Microwave Excited Hydrogen Plasma

Akihisa Ogino1, Masahiro Sugiyama1 (1.Shizuoka Univ.)

Keywords:hydrogen plasma, hydrodesulfurization, MoS2