[8a-PB4-1~20] 8.3 Plasma deposition of thin film and surface treatment

△ [8a-PB4-9] Effect of Substrate Bias on Amino Group Modification onto Fluorocarbon Polymer Surface by He/NH₃ Gas Mixture Atmospheric Pressure Plasma Jets

〇Masahiro Kimpara¹, Masaaki Nagatsu^1,2,3 (1.Shizuoka Univ., 2.Shizuoka Univ., 3.Shizuoka Univ)

Keywords:plasama, teflon, amino group