The 78th JSAP Autumn Meeting, 2017

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Oral presentation

15 Crystal Engineering » 15.4 III-V-group nitride crystals

[8p-A301-1~12] 15.4 III-V-group nitride crystals

Fri. Sep 8, 2017 1:15 PM - 4:30 PM A301 (Main Hall)

Takayuki Nakano(Shizuoka Univ.), Tanikawa Tomoyuki(Tohoku Univ.)

3:30 PM - 3:45 PM

△ [8p-A301-9] Face-to-face annealing of AlN films grown by MOVPE

〇Shuichi Tanaka1, Shunsuke Okada1, Yusuke Hayashi2, Hideto Miyake2,1, Kazumasa Hiramatsu1 (1.Mie Univ., Grad. School of Engineering, 2.Mie Univ., Grad. School of Regional Innovation Studies)

Keywords:MOVPE, AlN