[8p-PA2-1~19] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[8p-PA2-13] A Study of Long-Term Vibration Characteristics of MEMS Accelerometers Fabricated by Au Electroplating

〇Daisuke Yamane^1,3, Toshifumi Konishi^1,2,3, Teruaki Safu², Koichiro Tachibana^1,3, Minami Teranishi^1,3, Chun-Yi Chen^1,3, Tso-Fu Mark Chang^1,3, Masato Sone^1,3, Katsuyuki Machida^1,3, Kazuya Masu^1,3 (1.Tokyo Tech., 2.NTT-AT, 3.JST-CREST)

Keywords:MEMS accelerometer, gold electroplating, long-term vibration