Takuya Toma

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Speaker, Author, Co-Author

Fri. Mar 17, 2017 9:00 AM - 12:45 PM E206 (E206)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[17a-E206-1~14] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

9:00 AM - 9:15 AM

[17a-E206-1] [JSAP Young Scientist Award Speech] Formation of low-k nanoporous SiO₂ films by F₂-laser deposition

〇Takuya Toma¹, Akira Suwa^1,2, Daichi Taniyama¹, Daisuke Nakamura¹, Hiroshi Ikenoue^1,2 (1.Kyushu Univ., 2.Department of Gigaphoton Next GLP, Kyushu Univ.)