9:00 AM - 9:15 AM
〇Takuya Toma1, Akira Suwa1,2, Daichi Taniyama1, Daisuke Nakamura1, Hiroshi Ikenoue1,2 (1.Kyushu Univ., 2.Department of Gigaphoton Next GLP, Kyushu Univ.)
Oral presentation
13 Semiconductors » 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology
Fri. Mar 17, 2017 9:00 AM - 12:45 PM E206 (E206)
Kuniyuki Kakushima(Titech), Tatsuya Okada(Univ. of the Ryukyus)
△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above
9:00 AM - 9:15 AM
〇Takuya Toma1, Akira Suwa1,2, Daichi Taniyama1, Daisuke Nakamura1, Hiroshi Ikenoue1,2 (1.Kyushu Univ., 2.Department of Gigaphoton Next GLP, Kyushu Univ.)
9:15 AM - 9:30 AM
〇Hayato Okamoto1, Keisuke Yamamoto1, Dong Wang1, Hiroshi Nakashima2 (1.IGSES, Kyushu Univ., 2.GIC, Kyushu Univ.)
9:30 AM - 9:45 AM
〇Shuichi Noda1, Yao-Jen Lee2, Ti-Ji Hong3, Fu-Kuo Hsueh2,3, Yiming Li3, Seiji Samukawa1,3 (1.Tohoku Univ., 2.NDL, Taiwan, 3.NCTU, Taiwan)
9:45 AM - 10:00 AM
〇(M1)Xuan Luo1, Tomonori Nishimura1, Takeaki Yajima1, Akira Toriumi1 (1.The Univ. of Tokyo)
10:00 AM - 10:15 AM
〇Tomonori Nishimura1, Takeaki Yajima1, Akira Toriumi1 (1.The Univ. of Tokyo)
10:15 AM - 10:30 AM
〇Naoya Okada1,2, Noriyuki Uchida1, Toshihiko Kanayama1 (1.AIST, 2.JST-PRESTO)
10:30 AM - 10:45 AM
〇Yuya Tsukamoto1, Weiguang Zuo1, Shun-ichiro Ohmi1 (1.Tokyo Tech)
10:45 AM - 11:00 AM
〇Yoshinori Tokuda1, Kazunori Harada1, Satoshi Ishikawa1, Shunsuke Imaizumi2, So Takamoto2, Satoshi Izumi2 (1.Toshiba, 2.Univ. of Tokyo)
11:00 AM - 11:15 AM
〇Tomohiro Nakamura1, Wengchang Yeh1, Shunichi Sato2 (1.Shimane Univ., 2.Ricoh Co.)
11:15 AM - 11:30 AM
〇Hideaki Tanimura1, Hikaru Kawarazaki1, Kazuhiko Fuse1, Makoto Abe1, Takayuki Aoyama1, Shinnichi Kato1, Ippei Kobayashi1 (1.SCREEN Semiconductor Solutions Co., Ltd.)
11:45 AM - 12:00 PM
〇Ryota Yoshimine1, Kaoru Toko1, Takashi Suemasu1 (1.Univ. of Tsukuba)
12:00 PM - 12:15 PM
〇Ryusuke Nakamura1, Masayuki Okugawa1, Hiroshi Numakura1, Manabu Ishimaru2, Hidehiro Yasuda3 (1.Osaka Pref. Univ., 2.Kyushu Inst. Univ., 3.Osaka Univ.)
12:15 PM - 12:30 PM
〇Michiru Hogyoku1, Takashi Izumida1, Seiji Onoue1 (1.Toshiba Corporation SDS Company)
12:30 PM - 12:45 PM
〇Sumio Sugisaki1, Matsuda Tokiyoshi1, Mutsumi Kimura1 (1.Ryukoku Univ.)
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