Hideaki Tanimura

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Speaker, Author, Co-Author

Fri. Mar 17, 2017 9:00 AM - 12:45 PM E206 (E206)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[17a-E206-1~14] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

11:15 AM - 11:30 AM

[17a-E206-10] Diffusion control in sub-nanometer order using Flash Lamp Annealing

〇Hideaki Tanimura¹, Hikaru Kawarazaki¹, Kazuhiko Fuse¹, Makoto Abe¹, Takayuki Aoyama¹, Shinnichi Kato¹, Ippei Kobayashi¹ (1.SCREEN Semiconductor Solutions Co., Ltd.)

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