Hayato Okamoto

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Speaker, Author, Co-Author

Fri. Mar 17, 2017 9:00 AM - 12:45 PM E206 (E206)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[17a-E206-1~14] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

9:15 AM - 9:30 AM

[17a-E206-2] [JSAP Young Scientist Award Speech] Fabrication of Low Resistivity Metal/Ge Contact with Amorphous Zr-Ge-N Interlayer

〇Hayato Okamoto¹, Keisuke Yamamoto¹, Dong Wang¹, Hiroshi Nakashima² (1.IGSES, Kyushu Univ., 2.GIC, Kyushu Univ.)