Susumu Okada

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Speaker, Author, Co-Author

Wed. Mar 15, 2017 1:15 PM - 6:00 PM 304 (304)

Symposium (Oral)
| Symposium
| Highly reliable metallization technology for long term retention

[15p-304-1~10] Highly reliable metallization technology for long term retention

4:30 PM - 5:00 PM

[15p-304-7] Stability and electronic properties of Cu thin films covered by atomic layer materials

〇Susumu Okada¹ (1.Univ. Tsukuba)