Richard H. Livengood

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Speaker, Author, Co-Author

Thu. Mar 16, 2017 1:15 PM - 6:00 PM 315 (315)

Symposium (Oral)
| Symposium
| Recent GFIS microscopy technology and its future prospects for R & D of materials and devices

[16p-315-1~11] Recent GFIS microscopy technology and its future prospects for R & D of materials and devices

3:00 PM - 3:30 PM

▲ [16p-315-6] Neon GFIS Gas Assisted Etch and Beam Induced Deposition -Characterization for Semiconductor Applications-

〇Richard H. Livengood¹, Shida Tan¹, Roy M. Hallstein¹, Waqas Ali¹ (1.Intel Corporation)