Osamu Oda

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Speaker, Author, Co-Author

Wed. Mar 15, 2017 1:45 PM - 6:15 PM 301 (301)

Symposium (Oral)
| Symposium
| The research forefront of plasma processing technology for energy related materials

[15p-301-2~10] The research forefront of plasma processing technology for energy related materials

3:00 PM - 3:30 PM

[15p-301-5] Plasma Application for Nitride Crystal Growth

〇Osamu Oda¹, Hiroyuki Kano², Shoji Den³, Hiroyuki Kondo¹, Masaru Hori¹ (1.Nagoya Univ., 2.NU-Rei Co., 3.Katagiri Eng. Co.)