Kazuhiro Mochizuki

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Speaker, Author, Co-Author

Wed. Mar 15, 2017 9:00 AM - 12:15 PM F204 (F204)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[15a-F204-1~12] 15.6 Group IV Compound Semiconductors (SiC)

11:00 AM - 11:15 AM

[15a-F204-8] Rate-Determining Process in Micro-Trench-Filling Epitaxial Growth of 4H-SiC

〇Kazuhiro Mochizuki¹, Shiyang Ji¹, Ryoji Kosugi¹, Yoshiyuki Yonezawa¹, Hajime Okumura¹ (1.AIST)