Toshiyuki Horiuchi

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Speaker, Author, Co-Author

Tue. Mar 14, 2017 1:15 PM - 5:00 PM 423 (423)

Oral presentation
| CS Code-sharing session
| CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

[14p-423-1~14] CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

4:15 PM - 4:30 PM

[14p-423-12] Homogenization of Patterning Characteristics in an Exposure Field of Projection Lithography
Using a Gradient-Index Lens Array

〇Toshiyuki Horiuchi¹, Takanori Sato¹, Hiroshi Kobayashi¹ (1.Tokyo Denki Univ.)