Shingo Kawachi

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Speaker, Author, Co-Author

Thu. Mar 16, 2017 9:00 AM - 12:15 PM 413 (413)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[16a-413-1~12] 13.3 Insulator technology

6.1と13.3と13.5のコードシェアセッションあり

9:15 AM - 9:30 AM

[16a-413-2] Theoretical study on interface orientation dependence of Si thermal oxidation ofVertical-BC-MOSFET with compressive strain

〇Shingo Kawachi¹, Hiroki Shirakawa¹, Kenta Chokawa¹, Masaaki Araidai^1,2,6, Hiroyuki Kageshima^3,6, Tetsuo Endoh^4,5,6, Kenji Shiraishi^1,2,6 (1.Nagoya Univ., 2.IMaSS, 3.Shimane Univ., 4.Tohoku Univ., 5.CIES, 6.JST-ACCEL)

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