Kazumasa Okamoto

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Speaker, Author, Co-Author

Tue. Mar 14, 2017 1:15 PM - 5:00 PM 423 (423)

Oral presentation
| CS Code-sharing session
| CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

[14p-423-1~14] CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

1:45 PM - 2:00 PM

[14p-423-3] Effect of addition of sulfones into chemically amplified resists

〇Kazumasa Okamoto^1,2, Shinya Fujii¹, Hiroki Yamamoto², Takahiro Kozawa², Toshiro Itani³ (1.Hokkaido Univ., 2.Osaka Univ., 3.EIDEC, Inc)