Yutaka Ikeda

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Speaker, Author, Co-Author

Wed. Mar 15, 2017 1:15 PM - 6:15 PM 311 (311)

Oral presentation
| 6 Thin Films and Surfaces
| 6.4 Thin films and New materials

[15p-311-1~18] 6.4 Thin films and New materials

6:00 PM - 6:15 PM

[15p-311-18] Deposition of Dense ZrO₂ Films by Chelate Flame Method

〇Yutaka Ikeda¹, Atsushi Nakamura^1,2, Keiji Komatsu¹, Hidetoshi Saitoh¹ (1.Nagaoka Univ. Tech., 2.Chubu Chelest Co., Ltd.)