09:30 〜 09:45 ▲ [14a-213-3] Deposition of Yttria Stabilized Zirconia (YSZ) Film on ZEOCOAT® Layer by Reactive Sputtering 〇(D)Haque Mayeesha Masrura1、Horita Susumu1 (1.Japan Adv. Inst. Sci. & Tech. (JAIST))