Yoshihiko Hirai

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Speaker, Author, Co-Author

Tue. Mar 14, 2017 1:15 PM - 5:00 PM 423 (423)

Oral presentation
| CS Code-sharing session
| CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

[14p-423-1~14] CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

4:30 PM - 4:45 PM

[14p-423-13] Experimental study on 3D photolithography by Built-in lens mask

Toshiki Tanaka¹, Daiki Sugihara¹, Masaru Sasago¹, Hisao Kikuta¹, Hiroaki Kawata¹, 〇Yoshihiko Hirai¹ (1.Osaka Pref. Univ.)