Koichi Koyama

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Speaker, Author, Co-Author

Fri. Mar 17, 2017 1:30 PM - 4:45 PM 211 (211)

Oral presentation
| 16 Amorphous and Microcrystalline Materials
| 16.3 Bulk, thin-film and other silicon-based solar cells

[17p-211-1~12] 16.3 Bulk, thin-film and other silicon-based solar cells

2:00 PM - 2:15 PM

[17p-211-3] Depth Profiles of P and H atom at a-Si/c-Si Interface by Plasma Ion Implantation

〇Koichi Koyama¹, Noboru Yamaguchi², Miwa Tanaka², Hideo Suzuki², Keisuke Ohdaira¹, Hideki Matsumura¹ (1.JAIST, 2.ULVAC)