Taku Hanna

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Speaker, Author, Co-Author

Fri. Mar 17, 2017 9:00 AM - 11:45 AM 502 (502)

Oral presentation
| 21 Joint Session K
| 21.1 Joint Session K

[17a-502-1~10] 21.1 Joint Session K

11:15 AM - 11:30 AM

[17a-502-9] Development of high hydrogen-sensitive thermal desorption spectroscopy system
- Application to quantitative analysis of low hydrogen-concentration in oxide semiconductor thin films -

〇(PC)Taku Hanna¹, Hidenori Hiramatsu^1,2, Isao sakaguchi³, Hideo Hosono^1,2 (1.MCES, Tokyo Tech, 2.MSL, Tokyo Tech, 3.NIMS)