The 64th JSAP Spring Meeting, 2017

Takuya Nagura

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Speaker, Author, Co-Author

Thu. Mar 16, 2017 9:00 AM - 12:15 PM 413 (413)

  • Oral presentation
  • | 13 Semiconductors
  • | 13.3 Insulator technology

[16a-413-1~12] 13.3 Insulator technology

6.1と13.3と13.5のコードシェアセッションあり

9:00 AM - 9:15 AM

[16a-413-1] Theoretical study on interface orientation dependence of Si thermal oxidation

〇Takuya Nagura1, Shingo Kawachi2, Kenta Chokawa2, Hiroki Shirakawa2, Masaaki Araiadi2,3,7, Hiroyuki Kageshima4,7, Tetsuo Endoh5,6,7, Kenji Shiraishi2,3,7 (1.Nagoya Univ., 2.Graduate School of Engineering, Nagoya Univ., 3.IMaSS, Nagoya Univ., 4.Interdisciplinary Graduate School of Science and Engineering, Shimane Univ., 5.Graduate School of Engineering, Tohoku Univ., 6.Center for Innovative Integrated Electronic Systems., 7.JST-ACCEL)