Tokuyuki Nakayama

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Speaker, Author, Co-Author

Tue. Mar 14, 2017 9:00 AM - 12:15 PM 213 (213)

Oral presentation
| 6 Thin Films and Surfaces
| 6.4 Thin films and New materials

[14a-213-1~12] 6.4 Thin films and New materials

12:00 PM - 12:15 PM

[14a-213-12] Influence of annealing conditions on properties of In-Ga-O semiconductor thin film deposited by sputtering with H₂O introduction

〇Tokuyuki Nakayama¹, Toshio Morimoto¹, Mana Shiraki¹, Fumihiko Matsumura¹, Takuya Odakura², Kousaku Shimizu² (1.Sumitomo Metal Minig, 2.Nihon Univ.)