Nozomu Tanaka

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Speaker, Author, Co-Author

Tue. Mar 14, 2017 9:15 AM - 12:00 PM 304 (304)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[14a-304-1~10] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

9:30 AM - 9:45 AM

△ [14a-304-2] Phosphorus doping to poly-Si thin films using XeF excimer laser irradiation in phosphoric acid solution and its electrical characteristics

〇(B)Nozomu Tanaka¹, Akira Suwa^1,2, Daisuke Nakamura¹, Taizoh Sadoh¹, Hiroshi Ikenoue^1,2 (1.Kyushu Univ., 2.Department of Gigaphoton Next GLP, Kyushu Univ.)

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