Akira Suwa

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Speaker, Author, Co-Author

Tue. Mar 14, 2017 9:00 AM - 12:15 PM 512 (512)

Oral presentation
| 3 Optics and Photonics
| 3.7 Laser processing

[14a-512-1~11] 3.7 Laser processing

11:30 AM - 11:45 AM

[14a-512-9] Al doping to poly-Si thin films using XeF excimer laser irradiation in AlCl₃ aqueous solution

〇Akira Suwa^1,2, Nozomu Tanaka¹, Daisuke Nakamura¹, Taizoh Sadoh¹, Hiroshi Ikenoue^1,2 (1.Graduate School of I.S.E.E. Kyushu Univ., 2.Department of Gigaphoton Next GLP, Kyushu Univ.)