Tadahiro Kawasaki

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Speaker, Author, Co-Author

Tue. Mar 14, 2017 1:15 PM - 5:30 PM 424 (424)

Oral presentation
| CS Code-sharing session
| CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

[14p-424-1~16] CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

2:00 PM - 2:15 PM

[14p-424-4] Development of electrostatic Cs-corrector using annular and circular electrodes (ACE corrector)(4)

〇Tadahiro Kawasaki^1,2, Takafumi Ishida², Ryuji Yoshida¹, Takeharu Kato¹, Tetsuji Kodama³, Masahiro Tomita⁴, Takashi Ikuta⁵ (1.JFCC, 2.Nagoya Univ., 3.Meijo Univ., 4.Vac. Device, 5.OECU)

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