Satoko Nakagawa

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Speaker, Author, Co-Author

Tue. Mar 14, 2017 1:45 PM - 5:30 PM F201 (F201)

Oral presentation
| 15 Crystal Engineering
| 15.7 Crystal evaluation, impurities and crystal defects

[14p-F201-1~14] 15.7 Crystal evaluation, impurities and crystal defects

2:45 PM - 3:00 PM

[14p-F201-5] Development of quantitative analysis for carbon concentration in silicon crystal using photoluminescence spectroscopy after electron irradiation via luminescence activation

〇Satoko Nakagawa¹, Nagai Yuta¹ (1.GlobalWafers Japan)