Megumi Inamitsu

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Speaker, Author, Co-Author

Tue. Mar 14, 2017 1:30 PM - 3:30 PM P1 (BP)

Poster presentation
| 8 Plasma Electronics
| 8 Plasma Electronics（Poster）

[14p-P1-1~25] 8 Plasma Electronics（Poster）

1:30 PM - 3:30 PM

[14p-P1-11] Preparing of functional thin films by plasma process using multi-elements targets

〇(B)Megumi Inamitsu¹, Hiroharu Kawasaki¹, Tamiko Ohshima¹, Yoshihito Yagyu¹, Takeshi Ihara¹ (1.Nat'l Ins. Tech. Sasebo Col.)