Dongju Shim

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Speaker, Author, Co-Author

Tue. Mar 14, 2017 1:30 PM - 3:30 PM P1 (BP)

Poster presentation
| 8 Plasma Electronics
| 8 Plasma Electronics（Poster）

[14p-P1-1~25] 8 Plasma Electronics（Poster）

1:30 PM - 3:30 PM

[14p-P1-12] Effects of Si thin film by inductively coupled plasma-assisted sputtering

〇(M1)Dongju Shim¹, Yuki Ishii¹, Tetsuya Kaneko¹, Hiroshi Kuwahata¹, Kunio Okimura¹, Haruo Shindo², Masao Isomura¹ (1.Tokai Univ, 2.Plasma Science and Engineering Inst)

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