Hirotomo Itagaki

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Speaker, Author, Co-Author

Tue. Mar 14, 2017 1:30 PM - 3:30 PM P1 (BP)

Poster presentation
| 8 Plasma Electronics
| 8 Plasma Electronics（Poster）

[14p-P1-1~25] 8 Plasma Electronics（Poster）

1:30 PM - 3:30 PM

[14p-P1-17] Study on nitriding technique with quasi-atmospheric pressure utilizing a microwave excited nitrogen-based radical flow

〇Hirotomo Itagaki¹, Shingo Hirose², Jaeho Kim¹, Xuelun Wang³, Naoto Kumagai³, Hisato Ogiso², Hajime Sakakita^1,3 (1.AIST Electronics and Photonics Inst., 2.AIST Advanced Manufacturing Research Inst., 3.NU-AIST GaN-OIL Photonics Device team)

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