kei nisikawa

→ Search for kei nisikawa in Google Scholar

Speaker, Author, Co-Author

Tue. Mar 14, 2017 1:30 PM - 3:30 PM P3 (BP)

Poster presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[14p-P3-1~19] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

1:30 PM - 3:30 PM

[14p-P3-3] Fabrication of carbonnano materials by supercritical fluid
using ultrafine metal particle method for LSI interconnect applications

〇kei nisikawa¹, Yoshio Uhara¹, Masatoshi Itoh¹, Sigeru Saito¹ (1.Tokyo.Univ.of Science)