Kazuya Onose

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Speaker, Author, Co-Author

Tue. Mar 14, 2017 1:30 PM - 3:30 PM P3 (BP)

Poster presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[14p-P3-1~19] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

1:30 PM - 3:30 PM

[14p-P3-6] Carbon nano-material filling for LSI interconnects using supercritical carbon dioxide

〇Kazuya Onose¹, Tuyoshi Miura¹, Makoto Muta¹, Kei Nishikawa¹, Yoshio Uhara¹, Masatoshi Itoh¹, Shigeru Saitou¹ (1.Tokyo Univ. of Science)