Takayoshi Tsutsumi

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Speaker, Author, Co-Author

Wed. Mar 15, 2017 9:00 AM - 10:45 AM 301 (301)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma measurements and diagnostics

[15a-301-1~7] 8.2 Plasma measurements and diagnostics

9:15 AM - 9:30 AM

▲ [15a-301-2] Behavior of Electron and Negative Ion Density in Very High Frequency Capacitively Coupled Plasma

〇Takayoshi Tsutsumi¹, Nishant Sirse², Albert Ellingboe², Makoto Sekine¹, Masaru Hori¹ (1.Nagoya Univ., 2.Dublin City Univ.)