Toshio Hayashi

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Speaker, Author, Co-Author

Wed. Mar 15, 2017 11:00 AM - 11:30 AM 301 (301)

Oral presentation
| 8 Plasma Electronics
| 8.9 Plasma Electronics Invited Talk

[15a-301-8~8] 8.9 Plasma Electronics Invited Talk

11:00 AM - 11:30 AM

[15a-301-8] [INVITED] Computational analyses of chemical reactions in gas phase and on surface in process plasmas

〇Toshio Hayashi¹, Kenji Ishikawa¹, Makoto Sekine¹, Masaru Hori¹ (1.Nagoya Univ.)