Nao Wada

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Speaker, Author, Co-Author

Wed. Mar 15, 2017 9:00 AM - 12:00 PM 318 (318)

Oral presentation
| CS Code-sharing session
| CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

[15a-318-1~11] CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

9:45 AM - 10:00 AM

[15a-318-4] Debris mitigation of laser driven extreme ultraviolet light (EUV) source for material processing

〇(M1C)Nao Wada¹, Nozomi Tanaka¹, Yasuyuki Kageyama², Ryo Deguchi¹, Akifumi Yogo¹, Hiroaki Nishimura¹ (1.ILE, Osaka Univ., 2.Toyota CRDL)