Yoshihiro Koga

→ Search for Yoshihiro Koga in Google Scholar

Speaker, Author, Co-Author

Wed. Mar 15, 2017 9:00 AM - 12:15 PM F201 (F201)

Oral presentation
| 15 Crystal Engineering
| 15.7 Crystal evaluation, impurities and crystal defects

[15a-F201-1~12] 15.7 Crystal evaluation, impurities and crystal defects

9:15 AM - 9:30 AM

[15a-F201-2] Characteristic of Carbon Cluster Ion Implanted Epitaxial Silicon Wafers (2)
- Hydrogen Passivation Effect of Room Temperature Bonding Wafer -

〇Yoshihiro Koga¹, Kazunari Kurita¹ (1.SUMCO CORPORATION)