Hao Song

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Speaker, Author, Co-Author

Wed. Mar 15, 2017 9:30 AM - 11:30 AM P11 (BP)

Poster presentation
| 16 Amorphous and Microcrystalline Materials
| 16.3 Bulk, thin-film and other silicon-based solar cells

[15a-P11-1~15] 16.3 Bulk, thin-film and other silicon-based solar cells

9:30 AM - 11:30 AM

[15a-P11-13] Deposition of Ultra-Thin SiN_x Films by Cat-CVD

〇(M1)Hao Song¹, Keisuke Ohdaira¹ (1.JAIST)