Shinsuke Harada

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Speaker, Author, Co-Author

Wed. Mar 15, 2017 1:45 PM - 6:15 PM 301 (301)

Symposium (Oral)
| Symposium
| The research forefront of plasma processing technology for energy related materials

[15p-301-2~10] The research forefront of plasma processing technology for energy related materials

2:30 PM - 3:00 PM

[15p-301-4] Plasma processing in SiC power devices fabrication

〇Shinsuke Harada¹, Hironori Yoshioka¹, Hidenori Koketsu^1,2, Ryoji Kosugi¹, Tomohisa Kato¹ (1.AIST, 2.Mitsubishi Electric)